Abstrakt

Hydro Carbon Gas Detection Based On Zeolite Gas Sensor Device

Ms.E.Jamuna, Mr.S.Duraisivam, Mr.N.Gurumoorthi, Mr.S.Subash

This work concern hydrocarbon gas sensor principle by transferring a novel zeolite-based on impedimetric, which has been originally manufactured by comprising only thick-film processes and one electroplating step. The sensing effect is based on a thin chromium oxide layer between the inter digital electrodes and a Pt-loaded ZSM-5 zeolite film. When hydrocarbons are present in the sensor ambient, the electrical sensor impedance increases strongly and selectively. The chromium oxide film is electroplated on Au screenprinted inter digital electrodes and then oxidized to Cr2O3. The electrode area is covered with the screenprinted zeolite. The sensor device is self-heated utilizing a planar platinum heater on the backside.